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MX Series
Semi/FPD Inspection Microscope
MX series semi/FPD inspection microscope supports maximum 300mm wafer and 17-inch LCD panel inspection, including 4, 6, 8, 12-inch carousel, can be applied to different sizes of wafer inspection. The ergonomic design is fully improved to provide users with more comfortable, flexible and fast operation experience, which is widely used in various industrial inspections of wafers and FPDs.
Providing users with efficient optical inspection solutions for semiconductors \FPDs
Ergonomics for maximum work efficiency
Modular components, free combination, more flexible configuration
A wide range of observation methods to meet your testing needs
Superior optics
The new optical system makes the illumination more uniform and the image more clear.
Elevation adjustable viewing tube
Elevation angle 0 ° ~ 35 ° adjustable observation tube, can meet the different heights of the crowd observation, greatly reducing the fatigue brought about by long hours of work.
Multiple carousels for multiple wafer sizes
Can carry 4-inch, 6-inch, 8-inch, 12-inch and other different work platforms, for wafers, LCD panel inspection to provide the best working environment, the maximum support for 300mm wafers and 17-inch LCD panel inspection.
Clutch Driven Carrier
The new clutch-driven load table enables quick and flexible movement of the platform to improve inspection efficiency.
Precision Optical Motorized Components
Safe, high-speed motorized objective converter, can quickly realize the objective lens switching, to avoid the operation part and wafer contact. Motorized aperture diaphragm interlocked with the objective lens, automatically adapting to different magnification objectives to optimize the image quality.
Ergonomic design
Low center of gravity, high stability all-metal frame, with strong anti-shake function, to ensure stable image quality.
Areas of application
Integrated bright field, dark field, polarized light, DIC and other observation functions. Widely used in semiconductor, FPD, circuit packaging circuit substrate, materials, casting metal ceramic parts, precision abrasives and other inspection.